c.DEPO X LPCVD系统

c.DEPO LP LPCVD-Anlage
PV Magazine's "Technology Highlights 2018"

水平管式LPCVD系统,用于本征或原位掺杂的多晶硅薄膜量产

c.DEPO X 平台设计采用LPCVD技术,在p型及n型硅片上实现n+和p+掺杂的钝化接触。

基于centrotherm在半导体行业的工艺技术沉淀,加之最先进的高产能管式系统,新型LPCVD系统打开了量产更高效太阳电池的大门。

得益于其工艺的广泛适用性和灵活性,c.DEPO X可以实现优异且稳定的工艺性能和钝化质量。

工艺流程

  • LPCVD

ISFH POLO solar cell

POLO solar cell

The Institute for Solar Energy Research in Hamelin (ISFH), developed a POLO solar cell which holds the current world record on a crystalline p-type wafer with a 26.1 % efficiency. For its research and development partner ISFH, centrotherm has deposited the polysilicon layer of the POLO solar cell in a LPCVD process.

The centrotherm LPCVD production system, the c.DEPO, was included in PV Magazine's "Technology Highlights 2018", and ranks number five among the 25 most innovative production solutions for the photovoltaic industry.